A Novel Non-driven Structural MEMS-based Gyroscope

نویسندگان

  • Lifeng Wu
  • Fuxue Zhang
چکیده

This paper describes a unique capacitively-sensed MEMS-based gyroscope, which utilizes rotating carrier rotate as driven force and responds to an external angular rate of yaw due to the Coriolis Effect. The basic construction and operating principles of the gyroscope are described and illustrated. MEMS-based gyroscope output is presented at different yaw angular acceleration. The raw results obtained from these tests performed to validate the effectiveness of the gyroscope.

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عنوان ژورنال:
  • JDCTA

دوره 4  شماره 

صفحات  -

تاریخ انتشار 2010